| Item type |
文献 / Documents(1) |
| 公開日 |
2018-11-12 |
| アクセス権 |
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アクセス権 |
open access |
| 資源タイプ |
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資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
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資源タイプ |
journal article |
| 出版社版DOI |
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関連識別子 |
https://doi.org/10.1038/s41467-017-00709-y |
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関連名称 |
10.1038/s41467-017-00709-y |
| 出版タイプ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| タイトル |
|
|
タイトル |
Dual-comb spectroscopic ellipsometry |
| 著者 |
南川, 丈夫
謝, 宜達
シブヤ, キュウキ
長谷, 栄治
カネオカ, ヨシキ
大久保, 章
稲場, 肇
水谷, 康弘
山本, 裕紹
岩田, 哲郎
安井, 武史
|
| 抄録 |
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内容記述 |
Spectroscopic ellipsometry is a means of investigating optical and dielectric material responses. Conventional spectroscopic ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine spectroscopic ellipsometry with dual-comb spectroscopy, namely, dual-comb spectroscopic ellipsometry. Dual-comb spectroscopic ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples. |
| 書誌情報 |
en : Nature Communications
巻 8,
p. 610,
発行日 2017-09-20
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| 収録物ID |
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収録物識別子タイプ |
ISSN |
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収録物識別子 |
20411723 |
| 収録物ID |
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収録物識別子タイプ |
NCID |
|
収録物識別子 |
AA12645905 |
| 出版者 |
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|
出版者 |
Springer Nature |
| 備考 |
|
|
値 |
Supplementary Information : ncomms_8_610_s1.pdf
Supplementary Movies : ncomms_8_610_s2.mov, ncomms_8_610_s3.mov, ncomms_8_610_s4.mov, ncomms_8_610_s5.mov, ncomms_8_610_s6.mov, ncomms_8_610_s7.mov
Peer Review File : ncomms_8_610_s8.pdf |
| 権利情報 |
|
|
権利情報 |
This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
| EID |
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|
識別子 |
334830 |
| 言語 |
|
|
言語 |
eng |
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