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Measurement of the residual stress in chromium nitride coatings deposited on an aluminum alloy substrate using arc ion plating method
https://tokushima-u.repo.nii.ac.jp/records/2007014
https://tokushima-u.repo.nii.ac.jp/records/20070144c67bb7f-331d-4b92-b023-f0e4552b6847
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
jvstb_37_6_062916.pdf (729 KB)
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| Item type | 文献 / Documents(1) | |||||||||||||||||||||||||||||
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| 公開日 | 2019-12-23 | |||||||||||||||||||||||||||||
| アクセス権 | ||||||||||||||||||||||||||||||
| アクセス権 | open access | |||||||||||||||||||||||||||||
| 資源タイプ | ||||||||||||||||||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||||||||||||||
| 資源タイプ | journal article | |||||||||||||||||||||||||||||
| 出版社版DOI | ||||||||||||||||||||||||||||||
| 関連識別子 | https://doi.org/10.1116/1.5118702 | |||||||||||||||||||||||||||||
| 関連名称 | 10.1116/1.5118702 | |||||||||||||||||||||||||||||
| 出版タイプ | ||||||||||||||||||||||||||||||
| 出版タイプ | VoR | |||||||||||||||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||||||||||||||
| タイトル | ||||||||||||||||||||||||||||||
| タイトル | Measurement of the residual stress in chromium nitride coatings deposited on an aluminum alloy substrate using arc ion plating method | |||||||||||||||||||||||||||||
| タイトル別表記 | ||||||||||||||||||||||||||||||
| その他のタイトル | Measurement of the residual stress in CrN coatings deposited on an Al alloy substrate | |||||||||||||||||||||||||||||
| 著者 |
日下, 一也
× 日下, 一也
WEKO
50
× シラサカ, ケンタ
× 米倉, 大介
WEKO
51
× タナカ, ユウタ
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| 抄録 | ||||||||||||||||||||||||||||||
| 内容記述 | Chromium nitride (CrN) coatings were deposited on Al alloy substrates using the arc ion plating method with different bias voltages and different thicknesses. The residual stresses of these samples were measured via x-ray diffraction using the sin2 ψ method because the CrN crystals in the coatings were nonoriented. The stress gradient across the CrN coating was calculated from the curved 2θ-sin2 ψ diagram. In the case of CrN coatings deposited at low bias voltage, the compressive residual stress that formed at the substrate interface was larger than the stress at the surface of the CrN coating. Conversely, in the case of CrN coatings deposited at high bias voltage, the compressive residual stress on the surface of the CrN coating was larger than the stress on the interface with the substrate. In CrN coatings deposited at high bias voltage, very large compressive residual stress on the CrN coating surface decreased with increasing coating thickness. | |||||||||||||||||||||||||||||
| 書誌情報 |
en : Journal of Vacuum Science & Technology B 巻 37, 号 6, p. 062916, 発行日 2019-10-28 |
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| 収録物識別子タイプ | ISSN | |||||||||||||||||||||||||||||
| 収録物識別子 | 21662746 | |||||||||||||||||||||||||||||
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| 収録物識別子タイプ | ISSN | |||||||||||||||||||||||||||||
| 収録物識別子 | 21662754 | |||||||||||||||||||||||||||||
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| 収録物識別子タイプ | NCID | |||||||||||||||||||||||||||||
| 収録物識別子 | AA10804928 | |||||||||||||||||||||||||||||
| 出版者 | ||||||||||||||||||||||||||||||
| 出版者 | American Vacuum Society | |||||||||||||||||||||||||||||
| 備考 | ||||||||||||||||||||||||||||||
| 値 | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Vacuum Science & Technology B 37, 062916 (2019) and may be found at https://doi.org/10.1116/1.5118702. This paper is part of the Conference Collection: 15th International Symposium on Sputtering and Plasma Processes (ISSP2019). |
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| EID | ||||||||||||||||||||||||||||||
| 識別子 | 360894 | |||||||||||||||||||||||||||||
| 言語 | ||||||||||||||||||||||||||||||
| 言語 | eng | |||||||||||||||||||||||||||||
