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Inscribing diffraction grating inside silicon substrate using a subnanosecond laser in one photon absorption wavelength
https://tokushima-u.repo.nii.ac.jp/records/2008455
https://tokushima-u.repo.nii.ac.jp/records/20084556cb1509d-b5e1-418b-84e4-6c5c3b6776c7
| 名前 / ファイル | ライセンス | アクション |
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srep_10_21451.pdf (1.56 MB)
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| Item type | 文献 / Documents(1) | |||||||||||||||||
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| 公開日 | 2020-12-11 | |||||||||||||||||
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| アクセス権 | open access | |||||||||||||||||
| 資源タイプ | ||||||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||
| 資源タイプ | journal article | |||||||||||||||||
| 出版社版DOI | ||||||||||||||||||
| 識別子タイプ | DOI | |||||||||||||||||
| 関連識別子 | https://doi.org/10.1038/s41598-020-78564-z | |||||||||||||||||
| 言語 | ja | |||||||||||||||||
| 関連名称 | 10.1038/s41598-020-78564-z | |||||||||||||||||
| 出版タイプ | ||||||||||||||||||
| 出版タイプ | VoR | |||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||
| タイトル | ||||||||||||||||||
| タイトル | Inscribing diffraction grating inside silicon substrate using a subnanosecond laser in one photon absorption wavelength | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 著者 |
スギモト, コウゾウ
× スギモト, コウゾウ
× 松尾, 繁樹× 直井, 美貴
WEKO
73
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| 内容記述タイプ | Abstract | |||||||||||||||||
| 内容記述 | Using focused subnanosecond laser pulses at 1.064μm wavelength, modification of silicon into opaque state was induced. While silicon exhibits one-photon absorption at this wavelength, the modification was induced inside 300μm-thick silicon substrate without damaging top or bottom surfaces. The depth range of the focus position was investigated where inside of the substrate can be modified without damaging the surfaces. Using this technique, diffraction gratings were inscribed inside silicon substrate. Diffraction from the gratings were observed, and the diffraction angle well agreed with the theoretical value. These results demonstrate that this technique could be used for fabricating infrared optical elements in silicon. | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 書誌情報 |
en : Scientific Reports 巻 10, p. 21451, 発行日 2020-12-08 |
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| 収録物識別子タイプ | ISSN | |||||||||||||||||
| 収録物識別子 | 20452322 | |||||||||||||||||
| 出版者 | ||||||||||||||||||
| 出版者 | Springer Nature | |||||||||||||||||
| 言語 | en | |||||||||||||||||
| 権利情報 | ||||||||||||||||||
| 言語 | en | |||||||||||||||||
| 権利情報 | This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/. | |||||||||||||||||
| EID | ||||||||||||||||||
| 識別子 | 372661 | |||||||||||||||||
| 識別子タイプ | URI | |||||||||||||||||
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| 言語 | eng | |||||||||||||||||
