| Item type |
文献 / Documents(1) |
| 公開日 |
2022-08-24 |
| アクセス権 |
|
|
アクセス権 |
open access |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 出版社版DOI |
|
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
https://doi.org/10.2961/jlmn.2022.01.2001 |
|
|
言語 |
ja |
|
|
関連名称 |
10.2961/jlmn.2022.01.2001 |
| 出版タイプ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| タイトル |
|
|
タイトル |
Raman Studies of Structural Changes in Diamond-like Carbon Films on Si Induced by Ultrafast Laser Ablation |
|
言語 |
en |
| 著者 |
タカバヤシ, ケイスケ
Khamaron, Khaidir Bin
富田, 卓朗
タカハシ, タカシ
コバヤシ, ヨウヘイ
ヤマグチ, マコト
|
| 抄録 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
In this study, the diamond-like carbon (DLC), a tetrahedral amorphous carbon sample deposited on Si, was irradiated using a picosecond laser. We evaluated the picosecond-laser-induced structural and morphological changes in DLC using micro-Raman spectroscopy via line measurements. We obtained the spatial distribution of the structure and morphology of DLC on Si by regression analysis of the Raman spectra. The photo-induced crater could be categorized into four regions: peripheral, morphological-change, structural-changes, and ablated regions. The structure and morphology of the peripheral region were similar to those of the as-received DLC. In the morphological-change region, which is inside the periphery region, the thickness of the DLC decreased without any structural changes. At the center of the crater, which is shown in black in the optical image, two regions were identified by Raman spectroscopy. On the outer side, there is a structural-change region where the graphitization of DLC materialized with a reduction in the film thickness. Inside the structural-change region, there is an ablated region where the DLC was degraded by laser ablation. |
|
言語 |
en |
| キーワード |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
Raman spectroscopy |
| キーワード |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
picosecond laser |
| キーワード |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
structural change |
| キーワード |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
laser ablation |
| キーワード |
|
|
言語 |
en |
|
主題Scheme |
Other |
|
主題 |
DLC |
| 書誌情報 |
en : Journal of Laser Micro/Nanoengineering
巻 17,
号 1,
p. 1-5,
発行日 2022-07
|
| 収録物ID |
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|
収録物識別子タイプ |
ISSN |
|
収録物識別子 |
18800688 |
| 出版者 |
|
|
出版者 |
Japan Laser Processing Society |
|
言語 |
en |
| EID |
|
|
識別子 |
376900 |
|
識別子タイプ |
URI |
| 言語 |
|
|
言語 |
eng |
jlmn_17_1_1.pdf (1.3 MB)
