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Residual stress and bending strength of ZnO films deposited on polyimide sheet by RF sputtering system
https://tokushima-u.repo.nii.ac.jp/records/2010868
https://tokushima-u.repo.nii.ac.jp/records/20108687d650ee4-f207-404a-9cce-bc67f8bfa8be
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
jvsa_34_3_031507.pdf (509 KB)
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| Item type | 文献 / Documents(1) | |||||||||||||||||||||||
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| 公開日 | 2023-03-20 | |||||||||||||||||||||||
| アクセス権 | ||||||||||||||||||||||||
| アクセス権 | open access | |||||||||||||||||||||||
| 資源タイプ | ||||||||||||||||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||||||||
| 資源タイプ | journal article | |||||||||||||||||||||||
| 出版社版DOI | ||||||||||||||||||||||||
| 関連識別子 | https://doi.org/10.1116/1.4944610 | |||||||||||||||||||||||
| 関連名称 | 10.1116/1.4944610 | |||||||||||||||||||||||
| 出版タイプ | ||||||||||||||||||||||||
| 出版タイプ | VoR | |||||||||||||||||||||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||||||||||||||||||||
| タイトル | ||||||||||||||||||||||||
| タイトル | Residual stress and bending strength of ZnO films deposited on polyimide sheet by RF sputtering system | |||||||||||||||||||||||
| 著者 |
日下, 一也
× 日下, 一也
WEKO
50
× マルオカ, ユタカ
× 松英, 達也
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| 抄録 | ||||||||||||||||||||||||
| 内容記述 | Zinc oxide (ZnO) films were deposited on a soft polyimide sheet substrate by radio frequency sputtering with a ZnO powder target, and the films' crystal orientations and residual stress were investigated using x-ray diffraction as a function of substrate temperature. C-axis oriented ZnO films were achieved using this ZnO powder target method. The ZnO films exhibited high compressive residual stresses between −0.7 and −1.4 GPa. Finally, the authors examined the strength of the obtained film by applying tensile bending loads. No cracks were observed on the surfaces of the ZnO films after a bending test using cylinders with diameters >25 mm. After a bending test using a cylinder with a diameter of 19 mm, large cracks were formed on the films. Therefore, the authors concluded that the tensile bending strength of the obtained films was greater than ∼420 MPa. | |||||||||||||||||||||||
| 書誌情報 |
en : Journal of Vacuum Science & Technology A 巻 34, 号 3, p. 031507, 発行日 2016-03-24 |
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| 収録物識別子タイプ | ISSN | |||||||||||||||||||||||
| 収録物識別子 | 07342101 | |||||||||||||||||||||||
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| 収録物識別子タイプ | ISSN | |||||||||||||||||||||||
| 収録物識別子 | 15208559 | |||||||||||||||||||||||
| 出版者 | ||||||||||||||||||||||||
| 出版者 | AIP Publishing | |||||||||||||||||||||||
| 備考 | ||||||||||||||||||||||||
| 値 | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Kazuya Kusaka et al., J. Vac. Sci. Technol. A 34(3), 031507 (2016) and may be found at https://doi.org/10.1116/1.4944610. | |||||||||||||||||||||||
| EID | ||||||||||||||||||||||||
| 識別子 | 314496 | |||||||||||||||||||||||
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| 言語 | eng | |||||||||||||||||||||||
